Imprinting method and process for producing a member in which a mold contacts a pattern forming layer

摘要

An imprinting method in which alignment control of a mold and a substrate is effected and a pattern formed on the mold is transferred onto a pattern forming layer provided on the substrate. The imprinting method includes a step in which the mold and the substrate are brought near to each other while effecting the alignment control, after the alignment control is started, to bring the mold and the pattern forming layer into contact with each other, and then, the pattern forming layer is cured, and a step in which the gap between the mold and the substrate is increased, after the pattern forming layer is cured. Further, the alignment control is stopped after the alignment control is started, and at least one of before and after the mold contacts the pattern forming layer.

主权项

1. An imprinting method in which alignment control of a mold and a substrate is effected with respect to an in-plane direction of the substrate and a pattern formed on the mold is transferred onto a pattern forming layer provided on the substrate, said imprinting method comprising:
a step of bringing the mold and the substrate near to each other while effecting the alignment control, based on a driving profile, after the alignment control is started, to bring the mold and the pattern forming layer into contact with each other, and then the pattern forming layer is cured; and a step of increasing a gap between the mold and the substrate, after the pattern forming layer is cured, wherein the driving profile for the alignment control after contact of the mold and the pattern forming layer is different from the driving profile for the alignment control before the contact of the mold and the pattern forming layer, wherein the driving profile for the alignment control is a profile for moving at least one of the mold and the substrate to a target position, and wherein the driving profile for the alignment control includes at least one of an acceleration, a speed, a driving voltage, and a driving current.