Pressure type flow rate control device

摘要

A pressure type flow rate control device provides flow rate control for gas at 100-500° C. with an error not more than 1.0% F.S. The pressure type flow rate control device includes a valve body with a fluid passage, a valve portion interposed in the passage, a valve drive unit driving the valve portion to open/close the passage, a restriction mechanism on the downstream side of the valve portion in the passage, a temperature detector detecting gas temperature between the valve portion and restriction mechanism, a pressure detector detecting gas pressure between the valve portion and restriction mechanism, and an arithmetic control device controlling flow rate of gas in the restriction mechanism based on values detected by the temperature detector and the pressure detector, wherein the temperature detector is inserted in an attachment hole of the valve body at a position just above an outlet side fluid passage.

主权项

1. A pressure type flow rate control device comprising:
(a) a valve body, wherein a fluid passage is formed in the valve body, the valve body comprising
(i) a valve main body; (b) a valve portion interposed in the fluid passage; (c) a valve drive unit operably connected to drive the valve portion, wherein the valve drive unit opens and closes the fluid passage by driving the valve portion; (d) a restriction mechanism provided on the downstream side of the valve portion in the fluid passage; (e) a temperature detector disposed to detect a gas temperature between the valve portion and the restriction mechanism; (f) a pressure detector disposed to detect a gas pressure between the valve portion and the restriction mechanism; and (g) an arithmetic control device that arithmetically controls a flow rate of a gas distributed in the restriction mechanism based on detected values of temperature and pressure detected by the temperature detector and the pressure detector, respectively, and the arithmetic control device controls the valve drive unit, wherein the valve portion attaches to the valve main body, and the temperature detector is inserted in an elongated bottomed attachment hole opened inward from a surface of the valve main body at a position overlapping an outlet side fluid passage between the valve portion and the restriction mechanism.