High purity ozone generator for optics cleaning and recovery

摘要

An apparatus for producing a high purity stream of ozone including a reaction chamber having an inlet and an outlet, a gaseous feed stream having a first purified component and an ultraviolet source. The gaseous feed stream enters the reaction chamber through the inlet, the first purified component includes oxygen, the ultraviolet source forms ozone from the oxygen, and the ozone exits the reaction chamber through the outlet.

主权项

1. An optical module comprising:
a high purity ozone generator comprising:
a reaction chamber comprising an inlet and an outlet;a gaseous feed stream comprising a first purified component; andan ultraviolet source;wherein the gaseous feed stream enters the reaction chamber through the inlet, the first purified component comprises oxygen, the ultraviolet source forms ozone from the oxygen, and the ozone exits the reaction chamber through the outlet; and at least one optical assembly comprising at least one lens, coupled to the high purity ozone generator and adapted for receiving the ozone from the outlet, wherein the ozone cleans the at least one optical assembly.