| 摘要 |
Provided is a narrow spectrum laser device that outputs pulsed laser beams by executing a plurality of burst oscillations including a first burst oscillation and a second burst oscillation that is executed the first burst oscillation. The narrow spectrum laser device may comprise: a laser resonator; a chamber positioned within the laser resonator; a pair of electrodes positioned in the chamber; a power source that applies a pulse voltage to the pair of electrodes; a wavelength selective element positioned in the laser resonator; a spectral width variation unit positioned in the laser resonator; and a control unit that measures the duty during a prescribed period before the time the second burst oscillation begins, measures the stopped time from the time the first burst oscillation is completed to the time the second burst oscillation begins, and controls the spectral width variation unit on the basis of the duty and the stopped time. |
