发明名称 |
Target Expansion Rate Control in an Extreme Ultraviolet Light Source |
摘要 |
A method includes providing a target material that comprises a component that emits extreme ultraviolet (EUV) light when converted to plasma; directing a first beam of radiation toward the target material to deliver energy to the target material to modify a geometric distribution of the target material to form a modified target; directing a second beam of radiation toward the modified target, the second beam of radiation converting at least part of the modified target to plasma that emits EUV light; measuring one or more characteristics associated with one or more of the target material and the modified target relative to the first beam of radiation; and controlling an amount of radiant exposure delivered to the target material from the first beam of radiation based on the one or more measured characteristics to within a predetermined range of energies. |
申请公布号 |
US2017048957(A1) |
申请公布日期 |
2017.02.16 |
申请号 |
US201514824141 |
申请日期 |
2015.08.12 |
申请人 |
ASML Netherlands B.V. |
发明人 |
Riggs Daniel Jason;Rafac Robert Jay |
分类号 |
H05G2/00 |
主分类号 |
H05G2/00 |
代理机构 |
|
代理人 |
|
主权项 |
1. A method comprising:
providing a target material that comprises a component that emits extreme ultraviolet (EUV) light when converted to plasma; directing a first beam of radiation toward the target material to deliver energy to the target material to modify a geometric distribution of the target material to form a modified target; directing a second beam of radiation toward the modified target, the second beam of radiation converting at least part of the modified target to plasma that emits EUV light; measuring one or more characteristics associated with one or more of the target material and the modified target relative to the first beam of radiation; and controlling an amount of radiant exposure delivered to the target material from the first beam of radiation based on the one or more measured characteristics to within a predetermined range of energies. |
地址 |
Veldhoven NL |