CRUCIBLE FOR ELECTRON-BEAM EVAPORATOR

摘要

Disclosed is a crucible that exhibits stable evaporation efficiency and durability with respect to Al, is used in an evaporation source of an electron-beam evaporator, and includes a storage unit, which includes a wall and a bottom and in which a deposition material is placed, and a wetting prevention unit that includes another wall, which is taller than the wall of the storage unit, and another bottom, and is combined with an exterior of the storage unit. The wetting prevention unit is provided so that only the wall of the storage unit is wet with Al, and accordingly, the lifespan of the crucible is lengthened. Further, contact with the ceramic material in order to prevent wetting is minimized, thereby preventing a reduction in the physical properties of the thin film due to the impurities mixed with the deposited Al.

主权项

1. A crucible for an electron-beam evaporator, which is used in an evaporation source of the electron-beam evaporator, the crucible comprising:
a storage unit which includes a wall and a bottom and in which a deposition material is placed; and a wetting prevention unit that includes another wall, which is taller than the wall of the storage unit, and another bottom, and which is combined with an exterior of the storage unit.