| 发明名称 |
ELECTRICAL FUSE AND/OR RESISTOR STRUCTURES |
| 摘要 |
Electrical fuse (eFuse) and resistor structures and methods of manufacture are provided. The method includes forming metal gates having a capping material on a top surface thereof. The method further includes protecting the metal gates and the capping material during an etching process which forms a recess in a dielectric material. The method further includes forming an insulator material and metal material within the recess. The method further includes forming a contact in direct electrical contact with the metal material. |
| 申请公布号 |
US2017047286(A1) |
申请公布日期 |
2017.02.16 |
| 申请号 |
US201514826628 |
申请日期 |
2015.08.14 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BASKER Veeraraghavan S.;CHENG Kangguo;KHAKIFIROOZ Ali;LI Juntao |
| 分类号 |
H01L23/525;H01L21/3105;H01L21/311;H01L27/06;H01L21/8234 |
主分类号 |
H01L23/525 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method comprising:
forming metal gates having a capping material on a top surface thereof; protecting the metal gates and the capping material during an etching process which forms a recess in a dielectric material; forming an insulator material and metal material within the recess; and forming a contact in direct electrical contact with the metal material. |
| 地址 |
Armonk NY US |
