| 发明名称 |
IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE |
| 摘要 |
The present invention provides an imprint apparatus which forms a pattern of an imprint material on a substrate by using a mold, the apparatus comprising an image sensing unit configured to sense an image of the imprint material via the mold, and a control unit configured to, in a state in which the mold and the imprint material are in contact with each other, cause the image sensing unit to sense the image of the imprint material while scanning the image sensing unit and obtain information on forming of the pattern of the imprint material based on the image obtained by the image sensing unit. |
| 申请公布号 |
US2017043511(A1) |
申请公布日期 |
2017.02.16 |
| 申请号 |
US201615224911 |
申请日期 |
2016.08.01 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Sato Hiroshi |
| 分类号 |
B29C43/58;B29C43/02;G03F7/00 |
主分类号 |
B29C43/58 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An imprint apparatus which forms a pattern of an imprint material on a substrate by using a mold, the apparatus comprising:
an image sensing unit configured to sense an image of the imprint material via the mold; and a control unit configured to, in a state in which the mold and the imprint material are in contact with each other, cause the image sensing unit to sense the image of the imprint material while scanning the image sensing unit and obtain information on forming of the pattern of the imprint material based on the image obtained by the image sensing unit. |
| 地址 |
Tokyo JP |
