ILLUMINATION OPTICAL ASSEMBLY, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

摘要

An illumination optical system can form a pupil intensity distribution with a desired beam profile. The illumination optical system for illuminating an illumination target surface with light from a light source is provided with a spatial light modulator which has a plurality of optical elements arrayed on a predetermined surface and individually controlled and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system; a divergence angle providing member which is arranged in a conjugate space including a surface optically conjugate with the predetermined surface and which provides a divergence angle to an incident beam and emits the beam; and a polarizing member which is arranged at a position in the vicinity of the predetermined surface or in the conjugate space and which changes a polarization state of a partial beam of a propagating beam propagating in an optical path.

主权项

1. An illumination optical system for illuminating an illumination target surface with light from a light source, the illumination optical system comprising:
a spatial light modulator having a plurality of optical elements arrayed on a predetermined surface and individually controlled, the spatial light modulator being configured to variably form a light intensity distribution on an illumination pupil of the illumination optical system; a divergence angle providing member arranged in a conjugate space including a surface optically conjugate with the predetermined surface, the divergence angle providing member being configured to provide a divergence angle to an incident beam and emit the beam; and a polarizing member arranged in a predetermined space including the predetermined surface or in the conjugate space, the polarizing member being configured to change a polarization state of a partial beam of a propagating beam propagating in an optical path.