发明名称 |
PHOTORESIST PATTERN TRIMMING METHODS |
摘要 |
Provided are methods of trimming photoresist patterns. The methods involve coating a photoresist trimming composition over a photoresist pattern, wherein the trimming composition includes a matrix polymer, a free acid having fluorine substitution and a solvent, the trimming composition being free of cross-linking agents. The coated semiconductor substrate is heated to cause a change in polarity of the resist polymer in a surface region of the photoresist pattern. The photoresist pattern is contacted with a developing solution to remove the surface region of the photoresist pattern. The methods find particular applicability in the formation of very fine lithographic features in the manufacture of semiconductor devices. |
申请公布号 |
US2017045822(A1) |
申请公布日期 |
2017.02.16 |
申请号 |
US201615243937 |
申请日期 |
2016.08.22 |
申请人 |
Rohm and Haas Electronic Materials LLC |
发明人 |
XU Cheng-Bai |
分类号 |
G03F7/38;H01L21/027;H01L21/311 |
主分类号 |
G03F7/38 |
代理机构 |
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代理人 |
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主权项 |
1. A method of trimming a photoresist pattern, comprising in sequence:
(a) providing a semiconductor substrate comprising one or more layers to be patterned on an upper surface thereof; (b) forming a photoresist pattern on the one or more layers to be patterned, wherein the photoresist pattern comprises a plurality of features and is formed from a chemically amplified photoresist composition, the photoresist pattern comprising a matrix polymer having acid labile groups; (c) coating a photoresist trimming composition over the photoresist pattern, wherein the trimming composition comprises a matrix polymer, a free acid having fluorine substitution and a solvent, and wherein the trimming composition is free of cross-linking agents; (d) heating the coated semiconductor substrate, thereby causing a change in polarity of the photoresist matrix polymer in a surface region of the photoresist pattern; and (e) contacting the photoresist pattern with a developing solution to remove the surface region of the photoresist pattern. |
地址 |
Marlborough MA US |