SPRAY PYROLYSIS APPARATUS HAVING DUAL NOZZLE

摘要

The present invention relates to a spray pyrolysis apparatus having a dual nozzle. An in-line spray pyrolysis thin-film forming apparatus, according to one embodiment of the present invention, may include: a support device that supports and transfers a substrate; a first nozzle part that provides a first precursor stream in the direction opposite to the transfer direction of the substrate to define a first sedimentation area; a second nozzle part disposed on the rear side of the first nozzle part with respect to the transfer direction of the substrate and providing a second precursor stream in the same direction as the transfer direction of the substrate to define a second sedimentation area; and a film transition area between the first sedimentation area and the second sedimentation area.