主权项 |
1. A method of testing a microelectromechanical (MEMS) microphone, the MEMS microphone including a pressure sensor positioned within a housing and a pressure input port to direct acoustic pressure from outside the housing toward the pressure sensor, the method comprising the acts of:
positioning the MEMS microphone and a reference microphone proximal to an acoustic pressure source so that the reference microphone input receives approximately the same acoustic pressure as the MEMS microphone input; powering the MEMS microphone and the reference microphone; comparing a MEMS microphone output signal of the MEMS microphone with a reference microphone output signal of the reference microphone; determining a common signal component, which is present in both the MEMS microphone output signal and the reference microphone output signal, based on the comparison between the MEMS microphone output signal and the reference microphone output signal; removing the common signal component from the MEMS microphone output signal; after removing the common signal component, determining a noise level in the MEMS microphone output signal; determining if the noise level exceeds a threshold value; and if the noise level exceeds the threshold value, rejecting the MEMS microphone. |