发明名称 LOW-COST METHOD FOR TESTING THE SIGNAL-TO-NOISE RATIO OF MEMS MICROPHONES
摘要 A method is provided for testing a MEMS microphone. The MEMS microphone includes a pressure sensor positioned within a housing and a pressure input port to direct acoustic pressure from outside the housing towards the pressure sensor. An acoustic pressure source provides acoustic pressure to the MEMS microphone. A reference microphone is positioned proximal to the MEMS microphone. An output signal of the MEMS microphone and an output signal of the reference microphone are compared. A common signal component is removed from the output signal of the MEMS microphone and the output signal of the MEMS microphone is analyzed for noise due to the construction of the device and for a signal-to-noise ratio of the device. Based on the noise signal and the signal-to-noise ratio, the MEMS microphone is rejected or accepted.
申请公布号 US2017048636(A1) 申请公布日期 2017.02.16
申请号 US201615339267 申请日期 2016.10.31
申请人 Robert Bosch GmbH 发明人 Stetson Philip Sean
分类号 H04R29/00 主分类号 H04R29/00
代理机构 代理人
主权项 1. A method of testing a microelectromechanical (MEMS) microphone, the MEMS microphone including a pressure sensor positioned within a housing and a pressure input port to direct acoustic pressure from outside the housing toward the pressure sensor, the method comprising the acts of: positioning the MEMS microphone and a reference microphone proximal to an acoustic pressure source so that the reference microphone input receives approximately the same acoustic pressure as the MEMS microphone input; powering the MEMS microphone and the reference microphone; comparing a MEMS microphone output signal of the MEMS microphone with a reference microphone output signal of the reference microphone; determining a common signal component, which is present in both the MEMS microphone output signal and the reference microphone output signal, based on the comparison between the MEMS microphone output signal and the reference microphone output signal; removing the common signal component from the MEMS microphone output signal; after removing the common signal component, determining a noise level in the MEMS microphone output signal; determining if the noise level exceeds a threshold value; and if the noise level exceeds the threshold value, rejecting the MEMS microphone.
地址 Stuttgart DE