SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR CALIBRATION OF METROLOGY TOOLS

摘要

A system, method and computer program product are provided for calibrating metrology tools. One or more design-of-experiments wafers is received for calibrating a metrology tool. A set of signals is collected by measuring the one or more wafers utilizing the metrology tool. A first transformation is determined to convert the set of signals to components, and a second transformation is determined to convert a set of reference signals to reference components. The set of reference signals is collected by measuring the one or more wafers utilizing a well-calibrated reference tool. A model is trained based on the reference components that maps the components to converted components, and the model, first transformation, and second transformation are stored in a memory associated with the metrology tool.

主权项

1. A method, comprising:
receiving one or more DoE (design-of-experiments) wafers for calibrating a metrology tool; collecting a set of signals by measuring the one or more DoE wafers utilizing the metrology tool; determining a first transformation to convert the set of signals to components; determining a second transformation to convert a set of reference signals to reference components; training a model, based on the reference components, that maps the components to converted components; and storing the model, first transformation, and second transformation in a memory associated with the metrology tool.