发明名称 窒化アルミニウム単結晶およびその製造方法
摘要 PROBLEM TO BE SOLVED: To provide an aluminum nitride single crystal excellent in transmissivity of ultraviolet light in a range of wavelength of 240 to 300 nm, a laminate having layers comprising the single crystal, a method for manufacturing the laminate, and a method for manufacturing the aluminum nitride single crystal excellent in the transmissivity of ultraviolet light from the laminate.SOLUTION: The aluminum nitride single crystal containing oxygen atoms and carbon atoms is characterized by satisfying the condition of the following equation (1): [O]-[C]>0, wherein the concentration of the oxygen atoms is [O] cmand the concentration of the carbon atoms is [C] cm.
申请公布号 JP6080148(B2) 申请公布日期 2017.02.15
申请号 JP20120025292 申请日期 2012.02.08
申请人 国立大学法人東京農工大学;株式会社トクヤマ 发明人 纐纈 明伯;熊谷 義直;永島 徹;久保田 有紀
分类号 C30B29/38;C23C16/01;C23C16/34;H01L21/205 主分类号 C30B29/38
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