| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive and high-reliable optical axis adjustment device capable of measuring a distance between optical device end surfaces in a noncontact manner.SOLUTION: An optical axis adjustment device 100 comprises: a light source whose wavelength is variable; a first optical device having an end surface reflecting a part of incident light from the light source and emitting a part of the incident light; a second optical device having an end surface reflecting a part of the incident light emitted from the first optical device; a fine movement stage 104 moving the first optical device, to make it movable in three axial directions with respect to the second optical device; a fine movement stage control part 106 for movement at a set movement amount; a transmitted light receiving part 108 measuring the light intensity of the incident light; a signal processing part 107 comprising a detection part detecting the intensity fluctuations of the light intensity of the incident light with respect to the wavelength change of the light source and a control part setting the wavelength of the output light of the light source; and an optical axis adjustment control part 109 calculating an optical axis position error between the first and second optical devices, on the basis of the information of the light intensity measured by the transmitted light receiving part. |
