发明名称 振動素子、振動子、電子デバイス、電子機器、及び移動体
摘要 PROBLEM TO BE SOLVED: To provide a vibration element that improves spurious caused by an inharmonic mode.SOLUTION: The vibration element vibrates by thickness slip vibration, and comprises a substrate including a first principle plane and a second principle plane having a front-back relationship, and a first excitation electrode provided on the first principle plane, and a second excitation electrode that is provided on the second principle plane and is larger than the first excitation electrode in a plan view. The first excitation electrode is disposed so as to stay in the outer fringe of the second excitation electrode in a plan view, and the energy confinement coefficient M of the vibration element satisfies 15.5≤M≤36.7.
申请公布号 JP6079280(B2) 申请公布日期 2017.02.15
申请号 JP20130022030 申请日期 2013.02.07
申请人 セイコーエプソン株式会社 发明人 石井 修
分类号 H03H9/19;H01L41/09;H01L41/18;H03B5/32 主分类号 H03H9/19
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