| 摘要 |
PROBLEM TO BE SOLVED: To provide a frame transport device of a frame for holding a substrate which prevents substrate breakage accidents and misalignment caused when stacking the frames for holding the substrates and is used for taking out the frame for holding the substrate which is stacked being misaligned.SOLUTION: A frame transport device includes a correction function which corrects a position and an inclination of a robot hand part on the basis of position information of a frame, which is detected by a position sensor included in the robot hand part of the frame transport device, and thereby enables stable transportation. |
