| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem in which: when positional deviation occurs according to a scanning direction of electron beams, the amount of deviation becomes different for each scanning direction in reciprocating scanning, and therefore, continuity of images is lost and a correct image cannot be obtained; every image is deviated in the same direction in a one-way scanning, and the center position of the images is deviated; and if the center position of the images is deviated, a field of view becomes different when the images are enlarged or reduced.SOLUTION: A charged particle beam device includes: a deflector that scans beams emitted from a charged particle source on a sample; a scanning signal generating unit that generates scanning signals to be provided to the deflector; a detecting unit that detects charged particles obtained on the basis of the irradiation of the beams emitted from the charged particle source; an AD conversion unit that digitally converts the output of the detecting unit; a control unit that generates operation timing of the deflector; and a delaying unit that delays the operation timing. The AD conversion unit is operated at the operation timing delayed by the delaying unit. |
