A GRAPHENE-BASED FIELD-EFFECT APPARATUS AND ASSOCIATED METHODS

摘要

A method comprising:
growing a layer of channel material (501), preferably graphene, on a growth wafer (512) to form a channel member, the growth wafer comprising a layer of catalyst material (511) separated from a carrier wafer (512) by a layer of release material (513), the catalyst material serving as a seed layer for growing the layer of channel material;
depositing a layer of polymeric material (502) over the formed channel member to form a supporting substrate for the layers of catalyst and channel material;
etching the layer of release material (513) to remove the release material and carrier wafer; and
patterning the layer of catalyst material (511) to form source and drain electrodes (516) configured to enable a flow of electrical current through the channel member.