| 摘要 |
An apparatus for cleaning an object (W), the apparatus comprising: an object support (16) for supporting the object; a low pressure chamber (15) for exposing a first surface of the object to a low pressure when the object is arranged on the object support, an electrode (23a, 23b) arranged adjacent to and separated from the first surface of the object when the object is arranged on the object support, the electrode being in electrical communication with a surface of the object support which is adjacent the first surface of the object; and a power supply (24a, 24b) arranged to apply a voltage between the electrode and the object; thereby generating a discharge between the object and the electrode. |
