发明名称 ジャイロセンサーおよび電子機器
摘要 PROBLEM TO BE SOLVED: To provide a gyro sensor capable of detecting angular velocities around at least two axes out of three axes intersecting with one another.SOLUTION: A gyro sensor 2 is provided with: a base portion 41; drive vibration arms 46 through 49 that are connected to the base portion 41 and are provided with driving means; and a plurality of detection vibration arms 42 and 43 extending from the base portion 41. The plurality of detection vibration arms 42 and 43 extend from one end of the base portion 41 and the other end opposite to the one end, respectively, and detect angular velocities generated around at least two axes out of an X-axis, a Y-axis and a Z-axis by being vibrated in an X-Y plane when the angular velocities are applied thereto, respectively. When the X-axis or the Y-axis is set to a detection axis, the detection vibration arms 42 and 43 are vibrated in the same direction with respect to an axis perpendicular to the detection axis on the X-Y plane. When the Z-axis is set to the detection axis, the detection vibration arms 42 and 43 are vibrated in a circumferential direction around the Z-axis.
申请公布号 JP6078957(B2) 申请公布日期 2017.02.15
申请号 JP20120056460 申请日期 2012.03.13
申请人 セイコーエプソン株式会社 发明人 石井 昌宏
分类号 G01C19/5607;H01L41/08;H01L41/09;H01L41/18 主分类号 G01C19/5607
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