发明名称 振動装置及び振動プログラム
摘要 PROBLEM TO BE SOLVED: To provide an oscillation device and an oscillation program that enable a collection of oscillation data faithfully corresponding to surface unevenness of an object.SOLUTION: The oscillation device comprises: an oscillation collection section that collects oscillation data corresponding to surface unevenness of an object as to a multiple spindle; a position detection section that detects a position of the device itself on the surface; a normal line detection section that detects a normal line direction on the surface for each position on the basis of the collected oscillation as to the multiple spindle; and an oscillation detection section that detects oscillation in the normal line direction on the surface for each position.
申请公布号 JP6079202(B2) 申请公布日期 2017.02.15
申请号 JP20120273681 申请日期 2012.12.14
申请人 株式会社ニコン 发明人 杉村 武昭
分类号 G01B21/00;G01H17/00;G01N19/08 主分类号 G01B21/00
代理机构 代理人
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