| 摘要 |
A plasma generator 10 for generating a plasma stream from a gas stream comprises a housing 50 configured to receive the gas stream and a coil 20 located within the housing and operable to generate the plasma stream from the gas stream. Locating the coil within the housing both improves the generation of the plasma stream (which improves the operation of the plasma generator in the treatment of any effluent stream since both capacitively-induced and inductively-induced plasmas are generated) and increases the range of materials from which the housing may be made since the coil is no longer placed outside of the housing, such as materials which are less damaged by reactive gas etching, which results in increased operating life for the chamber. Containment shrouds may be included to guide the gas around the housing both through the coil and around the coil. The shrouds may comprise a plurality of shroud sections. |
