Deposition substrate transferring unit, organic layer deposition apparatus including the same, and method of manufacturing organic light-emitting display device by using the same

摘要

A deposition substrate transferring unit that can deposit a deposition material at an exact location on a substrate, includes an electrostatic chuck that has a first surface to which a substrate is attached; and a carrier having a surface that combines with a second surface of the electrostatic chuck to move the electrostatic chuck in a first direction. The carrier includes accommodation parts disposed in empty space within the carrier, and supplementary ribs respectively formed on surfaces of the accommodation parts.

主权项

1. A method of manufacturing an organic light-emitting display device, the method comprising:
conveying, into a chamber, a deposition substrate transferring unit using a first conveyer unit that passes through the chamber while a substrate is fixed on a surface of an electrostatic chuck that is combined with a carrier of the deposition substrate transferring unit; forming a layer on the substrate by depositing a deposition material discharged from an organic layer deposition assembly while simultaneously moving the substrate relative to the organic layer deposition assembly using the first conveyer unit, wherein the organic layer deposition assembly in the chamber is spaced apart from the substrate by a predetermined distance; separating the substrate from the deposition substrate transferring unit; and conveying the deposition substrate transferring unit from which the substrate is separated using a second conveyer unit that passes through the chamber, wherein the carrier comprises accommodation parts that comprise empty spaces within the carrier, and supplementary ribs disposed on surfaces of the accommodation parts, respectively.