Vapor cell structure having cavities connected by channels for micro-fabricated atomic clocks, magnetometers, and other devices

摘要

A first apparatus includes a vapor cell having first and second cavities fluidly connected by multiple channels. The first cavity is configured to receive a material able to dissociate into one or more gases that are contained within the vapor cell. The second cavity is configured to receive the one or more gases. The vapor cell is configured to allow radiation to pass through the second cavity. A second apparatus includes a vapor cell having a first wafer with first and second cavities and a second wafer with one or more channels fluidly connecting the cavities. The first cavity is configured to receive a material able to dissociate into one or more gases that are contained within the vapor cell. The second cavity is configured to receive the one or more gases. The vapor cell is configured to allow radiation to pass through the second cavity.

主权项

1. An apparatus comprising: a vapor cell having first and second cavities fluidly connected by multiple channels; the first cavity configured to receive a material to dissociate into one or more gases that are contained within the vapor cell; the second cavity configured to receive the one or more gases; wherein the vapor cell is configured to allow radiation to pass through the second cavity; a silicon wafer comprising the cavities and the channels; and an optically transparent wafer secured to the silicon wafer, wherein the optically transparent wafer is thinner vertically between the silicon wafer and the optically transparent wafer in a location proximate to the first cavity than at a location proximate the second cavity and wherein the first and second cavities do not extend into the optically transparent wafer.