Micromechanical sensor device with a getter in an enclosed cavity

摘要

A micromechanical sensor device and a corresponding manufacturing method are described. The micromechanical sensor device includes a CMOS wafer having a front side and a rear side, a rewiring device formed on the front side of the CMOS wafer including a plurality of stacked printed conductor levels and insulation layers, an MEMS wafer having a front side and a rear side, a micromechanical sensor device formed across the front side of the MEMS wafer, a bond connection between the MEMS wafer and the CMOS wafer, a cavern between the MEMS wafer and the CMOS wafer, in which the sensor device is hermetically enclosed, and an exposed getter layer area applied to at least one of the plurality of stacked printed conductor levels and insulation layers.

主权项

1. A micromechanical sensor device, comprising:
a CMOS wafer having a front side and a rear side; a rewiring device formed on the front side of the CMOS wafer and including a plurality of stacked printed conductor levels and insulation layers; an MEMS wafer having a front side and a rear side; a micromechanical sensor device formed across the front side of the MEMS wafer in a layer that is different than of the MEMS wafer; a bond connection between the MEMS wafer and the CMOS wafer; a cavern between the MEMS wafer and the CMOS wafer, in which the sensor device is hermetically enclosed; and an exposed getter layer area applied to at least one of the plurality of stacked printed conductor levels and insulation layers; wherein the getter layer area has a front side that faces the MEMS wafer, an uppermost layer of the rewiring device has a front side that faces the MEMS wafer, such that a distance from the front side of the CMOS wafer to the front side of the uppermost layer of the rewiring device, wherein the sensor device is directly above the getter layer so that an axis that is perpendicular to the getter layer intersects the sensor device, wherein the getter layer is disposed in a recess formed in the rewiring device, wherein the sensor device flexes toward the getter layer and the rewiring device, and wherein the uppermost layer of the rewiring device serves as a stop that prevents the sensor device from contacting the getter layer.