Method of manufacturing semiconductor device

摘要

To improve a semiconductor device having a nonvolatile memory. A first MISFET, a second MISFET, and a memory cell are formed, and a stopper film made of a silicon oxide film is formed thereover. Then, over the stopper film, a stress application film made of a silicon nitride film is formed, and the stress application film over the second MISFET and the memory cell is removed. Thereafter, heat treatment is performed to apply a stress to the first MISFET. Thus, a SMT is not applied to each of elements, but is applied selectively. This can reduce the degree of degradation of the second MISFET due to H (hydrogen) in the silicon nitride film forming the stress application film. This can also reduce the degree of degradation of the characteristics of the memory cell due to the H (hydrogen) in the silicon nitride film forming the stress application film.

主权项

1. A method of manufacturing a semiconductor device, comprising the steps of:
(a) providing a semiconductor substrate having a first MISFET formed in a first region, and a nonvolatile memory having a charge storage portion formed in a second region; (b) forming a first insulating film over the first MISFET and the nonvolatile memory cell; (c) selectively removing the first insulating film in the second region and leaving the first insulating film in the first region; and (d) after the step (c), performing heat treatment to both the first and second regions of the semiconductor substrate, with the first insulating film in the first region, to memorize a stress in the first MISFET.