| 发明名称 | Method for making patterns on the surface of a substrate using block copolymers | ||
| 摘要 | A method for making patterns on the surface of a substrate by graphoepitaxy, includes depositing a layer of resin on the surface of the substrate; making patterns in the resin on the surface of a substrate; curing the patterns in the resin by producing a layer of amorphous carbon on the surface of the patterns in the resin; depositing a layer of statistical copolymer after curing the patterns in the resin; grafting the layer of statistical copolymer onto the patterns in the resin by annealing; and depositing a layer of a block copolymer into the spaces defined by the patterns in the resin after curing the patterns and the grafting of the layer of statistical copolymer. | ||
| 申请公布号 | US9566610(B2) | 申请公布日期 | 2017.02.14 |
| 申请号 | US201214122576 | 申请日期 | 2012.05.18 |
| 申请人 | CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS);COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES | 发明人 | Tiron Raluca;Gaugiran Stéphanie;Chevalier Xavier;Tedesco Serge |
| 分类号 | B05D5/00;B81C1/00;H01L21/027;H01L21/033 | 主分类号 | B05D5/00 |
| 代理机构 | Pillsbury Winthrop Shaw Pittman LLP | 代理人 | Pillsbury Winthrop Shaw Pittman LLP |
| 主权项 | 1. Method for making patterns on the surface of a substrate by graphoepitaxy comprising: depositing a layer of resin on the surface of the substrate; making patterns in the resin on the surface of the substrate; producing a layer of amorphous carbon on the surface of the patterns in the resin; depositing a layer of random copolymer after producing the layer of amorphous carbon on the surface of the patterns in the resin; grafting the layer of random copolymer onto the patterns in the resin, between the patterns in the resin and onto sides of the patterns in the resin, by annealing; depositing a layer of block copolymer into spaces defined by the patterns in the resin after the grafting. | ||
| 地址 | Paris FR | ||