发明名称 |
Semiconductor device having buried power rail |
摘要 |
A semiconductor device includes: a substrate; a power rail on the substrate; an active layer on the substrate and at same layer as the power rail; and a contact electrically connecting the power rail to the active layer. The active layer includes source/drain terminals. |
申请公布号 |
US9570395(B1) |
申请公布日期 |
2017.02.14 |
申请号 |
US201615158500 |
申请日期 |
2016.05.18 |
申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
Sengupta Rwik;Hong Joon Goo;Rodder Mark |
分类号 |
H01L23/02;H01L23/528;H01L23/535;H01L29/78;H01L21/768;H01L23/532;H01L29/06 |
主分类号 |
H01L23/02 |
代理机构 |
Lewis Roca Rothgerber Christie LLP |
代理人 |
Lewis Roca Rothgerber Christie LLP |
主权项 |
1. A semiconductor device comprising:
a substrate; a power rail on the substrate; an active layer on the substrate and at same layer as the power rail, the active layer comprising source/drain terminals; and a contact electrically connecting the power rail to the active layer. |
地址 |
Suwon-si KR |