发明名称 Semiconductor device having buried power rail
摘要 A semiconductor device includes: a substrate; a power rail on the substrate; an active layer on the substrate and at same layer as the power rail; and a contact electrically connecting the power rail to the active layer. The active layer includes source/drain terminals.
申请公布号 US9570395(B1) 申请公布日期 2017.02.14
申请号 US201615158500 申请日期 2016.05.18
申请人 Samsung Electronics Co., Ltd. 发明人 Sengupta Rwik;Hong Joon Goo;Rodder Mark
分类号 H01L23/02;H01L23/528;H01L23/535;H01L29/78;H01L21/768;H01L23/532;H01L29/06 主分类号 H01L23/02
代理机构 Lewis Roca Rothgerber Christie LLP 代理人 Lewis Roca Rothgerber Christie LLP
主权项 1. A semiconductor device comprising: a substrate; a power rail on the substrate; an active layer on the substrate and at same layer as the power rail, the active layer comprising source/drain terminals; and a contact electrically connecting the power rail to the active layer.
地址 Suwon-si KR