Non-lithographically patterned directed self assembly alignment promotion layers

摘要

A method of an aspect includes forming a directed self assembly alignment promotion layer over a surface of a substrate having a first patterned region and a second patterned region. A first directed self assembly alignment promotion material is formed selectively over the first patterned region without using lithographic patterning. The method also includes forming an assembled layer over the directed self assembly alignment promotion layer by directed self assembly. A plurality of assembled structures are formed that each include predominantly a first type of polymer over the first directed self assembly alignment promotion material. The assembled structures are each adjacently surrounded by predominantly a second different type of polymer over the second patterned region. The first directed self assembly alignment promotion material has a greater chemical affinity for the first type of polymer than for the second different type of polymer.

主权项

1. A fabrication method comprising:
forming a first directed self assembly alignment promotion material over first regions of a surface of a substrate but not over second regions of the surface of the substrate; forming a second directed self assembly alignment promotion material over the second regions of the surface of the substrate but not over the first regions of the surface of the substrate, the second directed self assembly alignment promotion material having an uppermost surface non-coplanar with an uppermost surface of the first directed self assembly alignment promotion material; and assembling a layer that includes at least two different polymeric materials over the first and second directed self assembly alignment promotion materials.