Angular velocity sensor

摘要

Provided is an angular velocity sensor including a plurality of angular velocity detection units each outputting a different detection result, and including a common driving circuit to drive the angular velocity detection units. The angular velocity detection units of the angular velocity sensor of the present invention are configured to have different driving amplitudes when being driven by a driving signal at the same frequency.

主权项

1. An angular velocity sensor comprising:
a plurality of angular velocity detection units that detect angular velocity; a driving circuit that drives the plurality of angular velocity detection units with a driving signal at a same frequency; and a detection circuit that outputs a detection result of each of the angular velocity detection units, wherein
each of the angular velocity detection units is configured to have a different driving amplitude respectively when being driven by the driving signal,the detection circuit outputs the detection result of each of the angular velocity detection units that corresponds to each of the driving amplitudes,each of the angular velocity detection units includes a driving vibration system that vibrates with the driving amplitude by the driving signal,each of the driving vibration systems included in each of the angular velocity detection units are configured to have a unique amplitude so as to not share vibration energy with the rest of the driving vibration systems,each of the driving vibration system included in each of the angular velocity detection units has a different natural frequency, thus each having a different driving amplitude when being driven by the driving signal,each of the angular velocity detection units has a different detection range, andthe driving circuit makes the driving frequency follow the natural frequency of the driving vibration system included in the angular velocity detection unit having a narrowest detection range among the angular velocity detection units.