Light beam incident device and reflected light measurement device

摘要

Provided is a light beam incident device including an off-axis parabolic mirror that receives parallel light beams and converges the parallel light beams at one point on an object to be measured, and an incident-side light reception surface of a mirror that feeds the parallel light beams to the off-axis parabolic mirror. An angle (incident angle) between the object to be measured and converged light beams obtained by converging the parallel light beams changes in accordance with a light reception portion at which the off-axis parabolic mirror receives the parallel light beams. The incident side light reception surface of the mirror can change the light reception portion by moving with respect to the off-axis parabolic mirror.

主权项

1. A light beam incident device comprising:
a light beam converging device that receives parallel light beams, and converges the parallel light beams at one point on an object to be measured; and a light beam feeding device that is positioned farther from a top portion of the light beam converging device than the object to be measured, and feeds the parallel light beams to the light beam converging device, wherein: the light beam feeding device receives incident light beams travelling in parallel and changes a travel direction of the incident light beams by a right angle, to feed the parallel light beams to the light beam converging device, the light beam converging device changes an angle between the object to be measured and converged light beams obtained by converging the parallel light beams, in accordance with a light reception position at which the light beam converging device receives the parallel light beams; the light beam feeding device moves parallel to an emission direction of the parallel light beams output from the light beam feeding device to the light beam converging device, to change the light reception position on the light beam converging device; and the object to be measured is positioned between the light beam converging device and the light beam feeding device.