TEMPLATE, IMPRINT APPARATUS, IMPRINT METHOD AND IMPRINT APPARATUS MANAGEMENT METHOD

摘要

According to the embodiments, a template in which a main pattern is placed on a pattern-formed surface of a template substrate, the main pattern being formed by a concave and convex pattern, the template substrate being transparent to an electromagnetic wave with a predetermined wavelength is provided. The template includes a first mark in which line-shaped first concave patterns and first convex patterns are alternately placed in a width direction on the pattern-formed surface. The first convex pattern includes a first light-blocking portion and a first translucent portion. The first light-blocking portion is a region including a first side surface in the width direction and being covered with a metal film. The first translucent portion is a region including a second side surface in the width direction and being not covered with the metal film.

主权项

1. A template in which a main pattern is placed on a pattern-formed surface of a template substrate, the main pattern being formed by a concave and convex pattern, the template substrate being transparent to an electromagnetic wave with a predetermined wavelength, the template comprising:
a first mark in which line-shaped first concave patterns and first convex patterns are alternately placed in a width direction on the pattern-formed surface, wherein the first convex pattern including
a first light-blocking portion that is a region including a first side surface in the width direction and being covered with a metal film, anda first translucent portion that is a region including a second side surface in the width direction and being not covered with the metal film.