| 摘要 |
[Problem] To provide: a substrate comprising diamond which is free-standing, in which warpage is suppressed, and variation in the angles of the crystal axis over the entire surface of the substrate is suppressed; and a method for producing the diamond substrate. [Solution] In the present invention, an underlying substrate is prepared and multiple columnar diamonds comprising diamond single crystals are formed on one side of the underlying substrate. The diamond single crystals are grown from the tip of each columnar diamond and the diamond single crystals grown from the tip of each columnar diamond are coalesced to form a diamond substrate layer which is separated from the underlying substrate to produce a diamond substrate from the diamond substrate layer. Thus, the difference between the highest portion and the lowest portion of the diamond substrate in the thickness direction is over 0 μm and 485 μm or less, and the variation in the angles of the crystal axis over the entire surface of the diamond substrate is over 0° and 3.00° or less. |
