发明名称 CONTROL OF POWER SUPPLIED TO A PLASMA TORCH TO COMPENSATE FOR CHANGES AT AN ELECTRODE
摘要 A method and apparatus for maintaining power output by a power supply configured to supply power to a plasma torch in a gas treatment system within a predetermined power limit and a gas treatment system are disclosed. The method comprises: periodically receiving at least one input signal indicative of a current power output by the power supply; in response to the at least one input signal indicating the power output has passed a predetermined value adjusting the power output such that the power output is within the predetermined power limit; the step of adjusting the power output comprising: outputting a control signal to change a flow rate of a source gas supplied to the plasma torch where the change would maintain a source gas flow rate within predetermined gas flow limits; and where the change would not maintain the source gas flow rate within the predetermined gas flow limits, outputting a control signal to change one of a current or voltage output by the power supply unit.
申请公布号 WO2017021694(A1) 申请公布日期 2017.02.09
申请号 WO2016GB52282 申请日期 2016.07.26
申请人 EDWARDS LIMITED 发明人 MAGNI, Simone;BOEGNER, Jerome;NOH, MinKyeong;SON, JiYoung;LEE, JinOk
分类号 H05H1/36 主分类号 H05H1/36
代理机构 代理人
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