发明名称 |
CONTROL OF POWER SUPPLIED TO A PLASMA TORCH TO COMPENSATE FOR CHANGES AT AN ELECTRODE |
摘要 |
A method and apparatus for maintaining power output by a power supply configured to supply power to a plasma torch in a gas treatment system within a predetermined power limit and a gas treatment system are disclosed. The method comprises: periodically receiving at least one input signal indicative of a current power output by the power supply; in response to the at least one input signal indicating the power output has passed a predetermined value adjusting the power output such that the power output is within the predetermined power limit; the step of adjusting the power output comprising: outputting a control signal to change a flow rate of a source gas supplied to the plasma torch where the change would maintain a source gas flow rate within predetermined gas flow limits; and where the change would not maintain the source gas flow rate within the predetermined gas flow limits, outputting a control signal to change one of a current or voltage output by the power supply unit. |
申请公布号 |
WO2017021694(A1) |
申请公布日期 |
2017.02.09 |
申请号 |
WO2016GB52282 |
申请日期 |
2016.07.26 |
申请人 |
EDWARDS LIMITED |
发明人 |
MAGNI, Simone;BOEGNER, Jerome;NOH, MinKyeong;SON, JiYoung;LEE, JinOk |
分类号 |
H05H1/36 |
主分类号 |
H05H1/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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