发明名称 |
FLOW PATH MEMBER |
摘要 |
There is provided a first substrate having a first main surface, a second substrate having a second main surface, a bonding member bonding the first main surface and the second main surface, and a flow path positioned between the first substrate and the second substrate and extended in a parallel direction with the first main surface and the second main surface, and the bonding member has a projection which is protruded from a portion between the first main surface and the second main surface toward an inner part of the flow path, the flow path includes a first portion having the projection provided in an inner part and a second portion linked to the first portion adjacently to an opposite side to a side where the projection of the first portion is provided, and a height of the first substrate is greater than a height of the second portion in the thickness direction. |
申请公布号 |
US2017040193(A1) |
申请公布日期 |
2017.02.09 |
申请号 |
US201415100200 |
申请日期 |
2014.11.28 |
申请人 |
KYOCERA Corporation |
发明人 |
INOUE Tomoyuki |
分类号 |
H01L21/67;H01J37/32;F28F21/04;C04B37/00;H01L21/683;F28F13/12 |
主分类号 |
H01L21/67 |
代理机构 |
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代理人 |
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主权项 |
1. A flow path member comprising a first substrate having a first main surface, a second substrate having a second main surface, a bonding member bonding the first main surface and the second main surface, and a flow path positioned between the first substrate and the second substrate and extended along the first main surface and the second main surface,
wherein the bonding member has a projection which is protruded from a portion between the first main surface and the second main surface toward an inner part of the flow path, the flow path has a first portion having the projection provided in an inner part and a second portion linked to the first portion adjacently to an opposite side to a side where the projection of the first portion is provided, and a height of the first portion is greater than a height of the second portion. |
地址 |
Kyoto-shi, Kyoto JP |