发明名称 FLOW PATH MEMBER
摘要 There is provided a first substrate having a first main surface, a second substrate having a second main surface, a bonding member bonding the first main surface and the second main surface, and a flow path positioned between the first substrate and the second substrate and extended in a parallel direction with the first main surface and the second main surface, and the bonding member has a projection which is protruded from a portion between the first main surface and the second main surface toward an inner part of the flow path, the flow path includes a first portion having the projection provided in an inner part and a second portion linked to the first portion adjacently to an opposite side to a side where the projection of the first portion is provided, and a height of the first substrate is greater than a height of the second portion in the thickness direction.
申请公布号 US2017040193(A1) 申请公布日期 2017.02.09
申请号 US201415100200 申请日期 2014.11.28
申请人 KYOCERA Corporation 发明人 INOUE Tomoyuki
分类号 H01L21/67;H01J37/32;F28F21/04;C04B37/00;H01L21/683;F28F13/12 主分类号 H01L21/67
代理机构 代理人
主权项 1. A flow path member comprising a first substrate having a first main surface, a second substrate having a second main surface, a bonding member bonding the first main surface and the second main surface, and a flow path positioned between the first substrate and the second substrate and extended along the first main surface and the second main surface, wherein the bonding member has a projection which is protruded from a portion between the first main surface and the second main surface toward an inner part of the flow path, the flow path has a first portion having the projection provided in an inner part and a second portion linked to the first portion adjacently to an opposite side to a side where the projection of the first portion is provided, and a height of the first portion is greater than a height of the second portion.
地址 Kyoto-shi, Kyoto JP