| 发明名称 |
DEVICE AND METHOD FOR CONTROLLING POSITIONING OF MULTIPLE ADJUSTABLE MIRROR ELEMENTS IN A MULTI-MIRROR ARRANGEMENT |
| 摘要 |
An external facility is used to control positioning of multiple displaceable mirror elements of a multi-mirror arrangement. The external facility is to a multi-mirror arrangement via a data channel having a bandwidth of at least 1 kHz per controlled degree of freedom of displacement. |
| 申请公布号 |
US2017038555(A1) |
申请公布日期 |
2017.02.09 |
| 申请号 |
US201615332187 |
申请日期 |
2016.10.24 |
| 申请人 |
Carl Zeiss SMT GmbH |
发明人 |
Horn Jan;Holz Markus;Specht Joerg;Eisenmenger Johannes;Krone Stefan |
| 分类号 |
G02B7/182;G03F7/20;G02B17/00 |
主分类号 |
G02B7/182 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A device configured to control positioning of multiple displaceable mirror elements of a multi-mirror arrangement, the device comprising:
a control facility separate from the multi-mirror arrangement, the control facility connected to the multi-mirror arrangement in a data-transmitting manner via a first data channel; and a supervisory unit connected to at least two inputs in a signal-transmitting manner, the first data channel being the single, common output of the supervisory unit, wherein the first data channel for each of the displaceable mirror elements has in each case a bandwidth of at least 1 kHz. |
| 地址 |
Oberkochen DE |
