A Pressurized Spray Deposition Device and Method for an Organic Material Steam

摘要

The invention relates to the technical field of display, particularly a pressurized spray deposition device and method for an organic material steam. The pressurized spray deposition device comprises an uniform-pressure mixing chamber, an organic material steam source, a high-pressure carrier gas feeding device, a piezoelectric pressurizing device and a nozzle, wherein the organic material steam source and the high-pressure carrier gas feeding device are respectively connected with the uniform-pressure mixing chamber, and an outlet of the uniform-pressure mixing chamber is connected with the nozzle through the piezoelectric pressurizing device. The organic material steam in the organic material steam source enters the uniform-pressure mixing chamber and is mixed with the introduced carrier gas to form a carried gas mixture. Under the action of the piezoelectric pressurizing device, the carried gas mixture is sprayed at a high speed from the nozzle via the piezoelectric pressurizing device to form a highly collimated jet. The jet impacts the deposition substrate, so that the deposition substrate selectively physically absorbs the organic material molecules, and the carrier gas escapes, forming an organic film with higher resolution, while avoiding the problem of waste of organic materials caused by the mask.

主权项

1. A pressurized spray deposition device for an organic material steam, wherein, comprising an uniform-pressure mixing chamber, an organic material steam source, a high-pressure carrier gas feeding device, a piezoelectric pressurizing device and a nozzle, the organic material steam source and the high-pressure carrier gas feeding device are both connected with the uniform-pressure mixing chamber, and an outlet of the uniform-pressure mixing chamber is connected with the nozzle through the piezoelectric pressurizing device.