发明名称 |
VACUUM PUMP WITH LONGITUDINAL AND ANNULAR SEALING MEMBERS |
摘要 |
The present invention relates to a multi-stage vacuum pump comprising: first and second half-shell stator components (102). (104) defining a plurality of pumping chambers (106) to (116) and for assembly together along respective longitudinally extending faces (118, 120); first and second end stator components (122), (124) for assembly at respective longitudinal end faces (126), (128) of the first and second half-shell stator components; longitudinal seals (12) for sealing between the first and second half- shell stator components when assembled together at the longitudinally extending faces; and annular seals (146) for sealing between the first and second end stator components and the first and second half- shell stator components when assembled; the annular sealing members and the longitudinal sealing members form a planar sealing interface therebetween. |
申请公布号 |
WO2017021695(A1) |
申请公布日期 |
2017.02.09 |
申请号 |
WO2016GB52290 |
申请日期 |
2016.07.27 |
申请人 |
EDWARDS LIMITED |
发明人 |
KIM, Jaeho;KAILASAM, Sivabalan |
分类号 |
F01C19/00;F01C21/10;F04C25/02;F04C27/00 |
主分类号 |
F01C19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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