发明名称 ORIGINAL HOLDING APPARATUS, PATTERN FORMING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
摘要 An original holding apparatus of a simple arrangement and an arrangement in which a part does not protrude below an original in a normal operation state is provided. The original holding apparatus 150 includes an original holding unit 2 which holds the original 1, and a fall prevention mechanism which changes from the first state in which fall prevention of the original from the original holding unit is not performed to the second state in which fall prevention of the original is performed in response to the stop or lack of supply of a holding force holding the original to the original holding unit.
申请公布号 WO2017022185(A1) 申请公布日期 2017.02.09
申请号 WO2016JP03288 申请日期 2016.07.12
申请人 CANON KABUSHIKI KAISHA 发明人 MATSUDA, Yozo
分类号 H01L21/027;G03F7/20;H01L21/683 主分类号 H01L21/027
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