MEMS TRANSDUCER FOR INTERACTING WITH A VOLUME FLOW OF A FLUID AND METHOD FOR PRODUCING SAME
摘要
The invention relates to a MEMS transducer for interacting with a volume flow of a fluid, comprising a substrate having a cavity, and an electromechanical transducer which is connected to the substrate in the cavity and has an element which can be deformed along a lateral movement direction. A deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related.
申请公布号
WO2016202790(A3)
申请公布日期
2017.02.09
申请号
WO2016EP63611
申请日期
2016.06.14
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.