JOINED BODY INCLUDING CERAMIC MEMBER AND METALLIC MEMBER AND METHOD FOR MANUFACTURING JOINED BODY

摘要

A joined body 10 is manufactured by joining a Mo- or Ti-made terminal 14 having a Ni coating, a Au coating, a Ni—Au coating (with Ni Serving as a base) to a recess 12a formed in a plate-shaped ceramic member 12 made of alumina or aluminum nitride through a joint layer 16. The joint layer 16 contains Au, Sn, Ag, Cu, and Ti and is in contact with a bottom surface of the recess 12a and with at least part of a side surface of the recess 12a (the entire side surface in this case). In the joint layer 16, its joint interface with the ceramic member 12 is Ti-rich. When the joined body 10 is cut in its thickness direction, the ratio of the total cross sectional area of pores to the cross-sectional area of the joint layer 16 (porosity) is 0.1 to 15%.

主权项

1. A joined body comprising:
a ceramic member made of alumina or aluminum nitride and having a recess; and a Mo- or Ti-made metallic member having a Ni coating, a Au coating, or a Ni—Au coating (with Ni serving as a base) and joined to the recess of the ceramic member through a joint layer; wherein the joint layer contains Au, Sn, Ag, Cu, and Ti and is in contact with a bottom surface of the recess and with at least part of a side surface of the recess, in the joint layer, a joint interface with the ceramic member is Ti-rich, pores are distributed in the joint layer, and, when the joined body is cut in a thickness direction of the joined body, the ratio of the total cross sectional area of the pores to the cross-sectional area of the joint layer (porosity) is 0.1 to 15%.