THIN FILM TRANSISTOR ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF, LIQUID CRYSTAL PANEL

摘要

Disclosed is a thin film transistor array substrate (100), comprising a plurality of thin film transistors (105) arranged in arrays on a glass substrate (101), each of the thin film transistors (105) comprising: a gate electrode (10) formed on the glass substrate (101), a gate insulating layer (20) covering and disposed on the gate electrode (10), an active layer (30) formed on the gate insulating layer (20), and a source electrode (40) and drain electrode (50) formed on the active layer (30). The source electrode (40) and the drain electrode (50) are separated from each other in a first direction, and an area of the active layer (30) corresponding to an area separating the source electrode (40) and the drain electrode (50) is a trench area (60). At least a portion of the gate insulating layer (20) corresponding to the trench area (60) has a plurality of protrusions (21) on a side facing towards the active layer (30), forming a wrinkled surface having a plurality of grooves (22). A side of the active layer (30) facing towards the gate insulating layer (20) is engaged with a surface of the gate insulating layer (20) completely.