X-RAY WINDOW

摘要

An x-ray window, which may be utilized within an x-ray source or an x-ray detector is disclosed, and a method for manufacturing the same. The x-ray window may be permeable to soft x-rays. The x-ray window may have at least one surface in contact with a pressure essentially equal that of a vacuum. The x-ray window may be multilayered with a thickness of less than or equal to one micron.

主权项

1. A method for making an x-ray window comprising:
depositing one or more layers of x-ray transmissive materials onto a silicon substrate; and patterning and etching the silicon substrate to form a ring structure having an aperture formed therethrough so that only the one or more layers of x-ray transmissive materials cover the aperture.