主权项 |
1. A sacrificial polymer composition comprising:
a thermally decomposable polymer comprising repeating units derived from an ester of a dicarboxylic acid and a difunctional tertiary alcohol; a thermally activated base generator, said thermally activated base generator comprising a cation selected from formula 1, 2, or 3:where each Re is independently selected from hydrogen, a methyl or ethyl group, a linear, branched or cyclic C3-C12 alkyl group; a linear, branched or cyclic C3-C12 heteroalkyl group having from 1 to 4 heteroatoms independently selected from nitrogen, oxygen or sulfur; a C6-C10 aryl group; a C5-C10 heteroaryl group having from 1 to 4 heteroatoms independently selected from nitrogen, oxygen or sulfur; or where two R1 groups are taken together with any intervening atoms to form one or more cyclic alkyl or heteroalkyl groups as previously defined, and where for formula 1, at least one R1 is hydrogen; and
a carrier solvent selected from acetophenone, α-angelicalactone, γ-butyrolactone, n-butyl acetate, diethylene glycol dimethyl ether, ethyl 3-ethoxypropionate, ethyl lactate, 2-heptanone, methyl isobutyl ketone, γ-octanoic lactone and combinations thereof. |