发明名称 6-MEMBERED CYCLIC DIENES AS STRONGLY REDUCING PRECURSORS FOR THE GROWTH OF ELEMENT FILMS BY VAPOR PHASE DEPOSITION
摘要 A method for reducing an atom to a reduced oxidation state includes a step of providing a vapor of a first compound having an atom in an oxidized state. A vapor of a reducing agent is provided. The reducing agent is selected from the group consisting of compounds described by formulae I, II, and III (See formulae): where R1, R2 R3, R4 are each independently H, C1-10 alkyl, C6-14 aryl, or C4-14 heteroaryl. The vapor of the first compound is reacted with the vapor of the reducing agent to form a second compound having the atom in a reduced state relative to the first compound.
申请公布号 WO2017023991(A1) 申请公布日期 2017.02.09
申请号 WO2016US45274 申请日期 2016.08.03
申请人 WAYNE STATE UNIVERSITY 发明人 WINTER, Charles H.
分类号 C23C16/455;C23C16/18;C23C16/44 主分类号 C23C16/455
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