COPPER/ALUMINIUM ALLOY CRYSTAL OSCILLATION PLATE COATING PROCESS

摘要

A copper/aluminium alloy crystal oscillation plate alloy coating process. Magnetron sputtering technology is used to form an aluminium film and a copper film on a quartz substrate. A copper/aluminium alloy film formed on the quartz plate in the process is firmly combined with the quartz plate, and the compositional proportions of the copper and aluminium in the copper/aluminium alloy film can be accurately controlled.