| 发明名称 |
HOLLOW RF FEED WITH COAXIAL DC POWER FEED |
| 摘要 |
A feed tube for a substrate processing system includes an outer tube and a feed rod. The feed rod is arranged within the outer tube. The feed rod is arranged to provide radio frequency power to the substrate processing system and the outer tube provides a return for the radio frequency power. At least one conductor is routed within the feed rod. The conductor is arranged to provide electrical power to at least one component of the substrate processing system separate from the radio frequency power provided by the feed rod. |
| 申请公布号 |
US2017040148(A1) |
申请公布日期 |
2017.02.09 |
| 申请号 |
US201514817372 |
申请日期 |
2015.08.04 |
| 申请人 |
Lam Research Corporation |
发明人 |
Augustino Jason;Drewery John;Paterson Alex;Benjamin Neil |
| 分类号 |
H01J37/32;H01P3/12 |
主分类号 |
H01J37/32 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A feed tube for a substrate processing system, the feed tube comprising:
an outer tube; a feed rod arranged within the outer tube, wherein the feed rod is arranged to provide radio frequency (RF) power to the substrate processing system and the outer tube provides a return for the RF power; and at least one conductor routed within the feed rod, wherein the conductor is arranged to provide electrical power to at least one component of the substrate processing system separate from the RF power provided by the feed rod. |
| 地址 |
Fremont CA US |
