Device for Detecting a Parameter of a Gas, Method for Operating Such a Device, and Measuring System for Determining a Parameter of a Gas

摘要

A device for detecting a parameter of a gas includes a body defining at least one cavity, at least one membrane, and at least one pressure measuring element. The cavity is configured to receive a gas from an outer area. The at least one membrane is configured to separate the cavity from the outer area. A first side of the at least one membrane facing toward the outer area includes a first layer of an electrically conductive material, and a second side of the at least one membrane facing toward the cavity and opposite the first side includes a second layer of the electrically conductive material. At least one portion of the at least one membrane includes an ion-conductive material. The at least one pressure measuring element is positioned on the at least one membrane, and is configured to detect a pressure of the gas in the cavity.

主权项

1. A device for detecting a parameter of a gas comprising:
a body that defines at least one cavity configured to receive a gas from an external space; at least one membrane configured to separate the cavity from the external space, the at least one membrane including:
a first side facing toward the external space and including a first layer of an electrically conductive material;a second side, facing toward the cavity and lying opposite the first side, the second side including a second layer of the electrically conductive material; andion-conducting material integrated with at least a section of the at least one membrane; and at least one pressure measuring element arranged on or in the at least one membrane, and configured to detect a pressure of the gas in the cavity.