OPTICAL WAVEGUIDE ELEMENT AND METHOD FOR MANUFACTURING OPTICAL WAVEGUIDE ELEMENT

摘要

There is provided an optical waveguide element and a method for manufacturing an optical waveguide element that make it possible, while reducing the cost of manufacturing the optical waveguide element, to reliably eliminate stray light that affects primary signal light.;The optical waveguide element of the present invention includes a silicon layer and silicon-dioxide layers placed above and below the silicon layer, in which the silicon layer includes a ridge optical waveguide and an impurity-implanted region placed at not less than a predetermined distance from the ridge optical waveguide.

主权项

1. An optical waveguide element, comprising a silicon layer and silicon-dioxide layers placed above and below the silicon layer,
wherein the silicon layer comprises a ridge optical waveguide and an impurity-implanted region placed at not less than a predetermined distance from the ridge optical waveguide.